VACNET RC4 RF Auto-Sputter 4" Dual Target Load Lock Automatic Sputtering System

Description

VACNET RC4 RF Auto-Sputter 4" Dual Target Automatic Sputtering System
Comes with what you see in the pictures. If you don't see it, you probably won't get it.
Specifications are from the unit and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
This unit is missing the 2 RF Generators and some vacuum components. We do not have the expertise to formally test it. It came from Motorola originally and was donated to Arizona State University. The model number was not marked on the unit. I got that from a sputtering system software.
Information About the Unit:
Power Requirements: 208 VAC, 3-Phase, 5-Wire, 90 Amps
Gas Types Used: O2 and Argon
Last Deposition Metals Used: Ni and Al in Chamber 2
Pre-sputter and pre-clean functionality
Indepdently chamber heater controls
Substrate carrier rotation
Computer - Pentium II, Windows NT 4.0
VacNet Sputtering System Software Version: 1.14, Decemember 11, 2002
Qty. 1: Kurt Lesker PN: EJTBNXX253A4 Boron Nitride Target, 99.6% Pure, 3.00" Dia. x 0.250" Thick
Qty. 1: Kurt Lesker PN: EJTCXXX506A4 Carbon Graphite Target, 99.999% Pure, 6.00" Dia. x 0.250" Thick
Qty. 2: CTI Cryo-Torr 100 Cryopumps on Load Locks, Part Number: 8103030, Serial Numbers: 4143427, 04196146
Qty. 2: CTI Cryo-Torr 8F Cryopumps on Process Chambers
Qty. 2: Advanced Energy AZX TCM II RF Match Tunning Controllers, Model Number: 3155039-002A, Serial Numbers: 156430 and 157624
Qty. 2: Advanced Energy RF Bias Match Units, Model Number: 3155031-000G, Serial Numbers: 155226, 153478
VAT PM-5 Adaptive Pressure Controller, Serial Number: PM641PM-94NM-1001-031
Granville-Phillips 303 Vacuum Process Controller, Catalog Number: 303001, Serial Number: 02972
Unit URS-100 Flow Controller
Qty. 4: CTI Temperature Indicators
Tylan Mass Flow Controller, Model Number: FC-2900M, Serial Number: MA9602417, Gas: O2, Range: 50 sccm
Leybold-Inficon Transpector 2.0 Residual Gas Analyzer, Model Number: TSPTB100 (3190), Serial Number: J9TB22B01071
Pfeiffer-Balzers TPU 062 Turbo Pump, Part Number: PM P02 092, Serial Number: 12173501, Description: DN 63 CF-F, 2P
UTI VSC Vacuum System Controller (has built in Balzers Turbo Pump Controlle), Serial Number: 910923-143
Leybold-Inficon Sentinel III SCU, Part Number: 753-200-G1, Serial Number: 17-0107
Leybold-Inficon Filter Changer, Part Number: 016-349-G1
Vacuum General Dynamass Flow Controller, Model Numer: DM-2400, Serial Number: 664620290 w/Model Numbers: KM-4 (qty. 1), FM-8 (qty. 2)
0.00 minimum for packaging, handling, and order processing. Shipping to be determined by destination.
Prior to shipment I will need to know the following information (filled out on a form that I will send you) for International Customers or Packages/Freight being Forwarded internationally. International customers may also be subject to a freight forwarder form if applicable.:
(1) Are you the end-user of this item?
(2) If you are not the ultimate end-user of the item, please state the ultimate end user's name.
(3) What is the ultimate country destination?
03/28/20