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Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper

Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper

$ 18481.7

Availability: 63 in stock
  • ASTeX Microwave Power Supply Part No: FI20160-1
  • MPN: Enviro 1
  • VAT Part No: 02110-BA24-AMZ1
  • GE Fanuc PLC System Part No: Series 90-30
  • Category: Semiconductor Tools Systems and Components
  • ENI Power Systems RF Generator Part No: OEM-6B-01M
  • Brooks Automation Robot Part No: 001-7600-02
  • Condition: The systems appears to be complete but this cannot be confirmed and is being sold as-is (see photos).
  • Inventory #: 20767
  • Brand: Ulvac Technologies
  • Model: E4200

    Description

    Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper
    Inventory # 20767
    Part No: Enviro 1
    Date of Manufacture: 08/23/2000
    Gases Used: NF3, H2/N2, CF4 and O2
    Included Components
    Main Body with Load Lock
    System Control Computer Part No: E4200
    Brooks Automation Robot Part No: 001-7600-02, VacuTran 5 VTR5
    Brooks Automation Robot Controller Part No: 001-8200-76
    Brooks Automation Teach Pendant Part No: 001-1984
    ASTeX Microwave Power Supply Part No: FI20160-1, SmartPower
    ASTeX Microwave Power Supply Part No: AX2050, ULVAC-10, 1017282
    ASTeX Precision Power Detector Waveguide Part No: FI20164
    ASTeX Magnetron Head Part No: FI20162-1
    ASTeX Magnetron Head Part No: FI20047
    ASTeX Waveguide Part No: FI20625
    ASTeX RF Match Part No: SmartMatch
    ENI Power Systems RF Generator Part No: OEM-6B-01M3
    GE Fanuc PLC System Part No: Series 90-30 (Qty. 2)
    VAT Part No: 02110-BA24-AMZ1
    Pictured Manuals and Accessories
    This Ulvac Technologies Enviro 1 150mm Asher Phoenix Single Chamber Resist Stripper is used working surplus. The systems appears to be complete but this cannot be confirmed and is being sold as-is (see photos). The physical condition is good, but there are signs of previous use and handling.
    Sale Details
    Item Condition:
    Used Working, 90 Day Warranty
    Estimated Packed Shipping Dimensions:
    L x W x H = TBD; Requires Freight Shipping
    Shipping Terms:
    All Domestic and International shipping quotes and/or fees are subject to change due to packaging requirements, custom packing, transport rate fluctuations, and supply chain demands. We will contact you regarding any shipments that require or incur additional after purchase packing fees or rate changes.
    Only items pictured are included:
    If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
    For items with multiple quantities:
    The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
    Items are sold with a
    90-Day Satisfaction Guarantee
    Lister 31