-40%
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller
Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller

Thermal Evaporator Vacuum System -Diffusion pump, mechanical pump & chiller

$ 13200

Availability: 100 in stock
  • Custom Bundle: Yes
  • Brand: Varian
  • All returns accepted: ReturnsNotAccepted
  • Bundle Description: -Vacuum chamber unit -Control tower -Recirculating chiller -Edwards vacuum pump
  • Condition: Offered as-is. The system has additional parts and wiring not present on original system as well as missing parts from original. The system and control panels may be dirty, have dents, damage, or may be non-functional without rewiring or repair. The buyer should only purchase if experienced with building/repairing/refurbishing vacuum systems from parts. That said, it has been used to make beautiful metallized aluminum mirror surfaces with this machine.
  • Modified Item: Yes
  • Model: THERMAL EVAPORATOR
  • MPN: 980-2461
  • Country/Region of Manufacture: United States
  • Modification Description: Ebeam system removed and converted to thermal evaporator.

    Description

    Thermal Evaporator High Vacuum Deposition System
    -Diffusion pump system, Edwards mechanical pump & Remcor chiller
    This vacuum system is originally a Varian model 980-2461 ebeam evaporation system but has been retrofitted with filament evaporator parts.
    The evaporator power supply was taken from a Ladd Research Industries system.
    Includes:
    -Edwards Speedivac High Vacuum Pump
    120V
    (Model No.: ED 200A)
    -Recirculating Chiller: Remcor Products Co. 6.73Amps(Model No.: CH250-A  1380)  115V 1Ph.
    Additional notes:
    -Requires 240V for diffusion pump, 120V for the mechanical pump and control tower.
    -Foreline, roughing, and vent valves are electrically actuated, no pneumatics required (from memory may run to an inelegant, unsecured wall switchplate).
    -The main gate valve is missing the external motor or actuator so the valve must be opened/closed manually by the shaft coupling.
    -The hoist motor was missing so it was replaced with a non-original motor and a rigged up 12V power source.
    -The chamber has a rotary feedthrough at the top for substrate rotation. Original turning motor is missing.
    -Water cooling system for diffusion pump was water-tight on last operation. Connects to the recirculating chiller.
    -Liquid N2 ion trap is untested.
    -Thermocouple gauges may or may not need to be replaced.
    -Extra wires dangling from old ebeam parts.
    -Nice heavy-duty power feedthrough into chamber.
    -Has nice access ports all around the base of the chamber.
    -Heavy duty stainless steel vacuum chamber with good vacuum seal.
    -Chamber is jacketed for heated degassing (has plug for heating element connection and hot water connection but untested).
    The system was in the corner of a woodshop and not a cleanroom. The last pic shows two pieces of clear plastic film that were metallized with the system to make a mirrored, electrically conductive surface.