TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly Lithius Working Spare

Description

TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly Lithius Working Spare
Inventory # A-18747
Part No: 5087-400391-12
Model No: SCAN ASSY
ARM-R
COT Coat Process Station
Removed from a TEL Tokyo Electron Clean Track Lithius System
Installed Components
Sanyo Denki Stepping Motor Part No: 103H7851-70E1, StepSyn
SMC Linear Actuator Part No: LG-96A-A1
Parts List (approximation, parts may vary)
Assembly Part No: 5087-400391-12 SCAN ASSY
5024-000118-11 ACTUATOR LG-96A-A1 1
028-001387-1 FITTING,TUBE EUC4-TR 2
020-000083-1 CAP SCREW M6*12 SUS304 8
020-000028-1 CAP SCREW M4*6 SUS304 2
5086-403395-12 ARM,COT #01 1
Assembly Part No: 5085-404660-11 HOLDER ASSY,TUBE
5004-300008-11 HOLDER,TUBE (509510036411 1
020-000005-1 CAP SCREW M3*6 SUS304 2
This TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly is used working surplus. The physical condition is good, but there are signs of previous use and handling.
Sale Details
Item Condition:
Used Working, 90 Day Warranty
Estimated Packed Shipping Dimensions:
L x W x H = 36"x24"x14" @ 40 lbs.
Only items pictured are included:
If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
For items with multiple quantities:
The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
Items are sold with a
90-Day Satisfaction Guarantee
Lister 31