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Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock
Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock

Plasma Therm SLR 770 Dual Chamber RIE with Shuttle Load Lock

$ 23760

Availability: 27 in stock
  • Equipment Type: Plasma Etching System
  • Country/Region of Manufacture: United States
  • Condition: This tool was pulled working from research lab. It needs some work on the load lock arm. All the parts are included. Turbo pumps, chiller, wall mounted power distribution panel. No backing pumps or load lock pump. Manuals and backup software included.
  • Technology: Etch
  • MPN: SLR-770
  • Brand: Plasma Therm

    Description

    The LH and RH chambers are RIE  , but with adjustable top electrode gap. (similar to old ECR config.)
    Both chambers can work also as PE (Plasma Etch-Top power). RIE or PE is switched by software.
    Both Chambers are Low pressure feature with TMP turbo pumps. Each chamber has 8 gas lines and MFC's. Software and manuals along with Neslab HX-75 chiller are included.
    The load lock arm needs rebuilt.