Pfeiffer Vacuum Classic 590 Evaporator PVD Sputtering system

Description

Opportunity:
2x Pfeiffer Classic 590 available!
Price: $ 99500/piece.
Configuration Coater 1:
2x Pfeiffer TPH 2301 (2300ls) completely overhauled
Pfeiffer DCU 600
2x VAT Throttle Valve 64048-pe48-ads2/0001
1x Pfeiffer PKR251 fullrange sensor
Pfeiffer TPR280 for prevacuum
Pfeiffer DUO 120 prepump (120m3/h)
Vacuumchamber:
for substrate size round 840mm
incl shielding and spare shielding set
2x viewport
Several feedthroughs
Rotating feedthrough incl thermocouple
Infrared heater
Watermanifold plus valves
Vacuumvalves for venting-pumpdown etc
Notes:
Currently used for Resistance Evaporation (no boats available)
C
urrent PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)
Configuration Coater 2:
2x Pfeiffer TPH 2201 s p c (horizontal turbo 2200ls) completely overhauled
Pfeiffer DCU 600
2x VAT Throttle Valve 64048-pe48-ads2/0001
1x Pfeiffer PKR251 fullrange sensor
Pfeiffer TPR280 for prevacuum
Pfeiffer DUO 120 prepump (120m3/h)
Vacuumchamber:
for substrate size round 840mm
incl shielding and spare shielding set
2x viewport
Several feedthroughs
Rotating feedthrough incl thermocouple
Infrared heater
Watermanifold plus valves
Vacuumvalves for venting-pumpdown etc
Notes:
Current used for Resistance Evaporation (no boats available)
C
urrent PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)