Metron EcoSys Marathon 8500 Gas Scrubber/Burn-Wet Abatement Treatment System

Description

Metron EcoSys Marathon 8500 Gas Scrubber/Burn-Wet Abatement Treatment System
Comes with what you see in the pictures. If you don't see it, you probably won't get it.
Specifications are from EcoSys/Metron and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
This unit is in good condition but we do not have the expertise to fully test it.
The Unit's Serial Number Tag Reads:
Model Number:
Marathon 8500
Part Number:
M5212234131
Schematic Number:
080-17314-00
Serial Number:
MPS-0290
Power Requirements:
208/230 VAC, Single Phase, 50/60 Hz, 13 F.L. Amps
Main CB/Fuse:
230 VAC, 20 A, 10K AIC
Largest Motor/Load Rating:
7 A
Applications:
Semiconductor and flat panel display processes
Advantages:
Excellent PFC's abatement efficiency
Limited NOx and CO emission
Superior particulate management technology
High flow capacity
Reduced water consumption and recirculating water system
Stable thermal processing
Low cost of ownership
Ease of installation and services
Third party certified, SEMI S2 compliance, CE Marked
Ethernet ready
Description:
The Marathon 8500 is an advanced, point-of-use, integrated burn-wet treatment system designed to provide a controlled gas conditioning environment for today’s demanding semiconductor and flat panel display process chemistries. The system is specifically designed for excellent PFCs abatement efficiency to help industries meet their environmental goals and commitments. With its advanced reactor chamber design and smart abatement technology, the Marathon provides superior particulate management for extended PM cycles and a cost-effective abatement solution. The high flow capacity of the Marathon can be configurated to further reduce CoO by handling multiple process tools per abatement unit and provide 100% process tool uptime with automatic backup capability.
Typical Usage Specifications:
Process Flow:
1-4 inlets
Per Inlet:
175 lpm (6 cfm)
Per System:
700 lpm (25 cfm)
Fresh Water Consumption
1
:
0.5 gpm (1.9 lpm)
Clean Dry Air Consumption:
1000 lpm (35.3 cfm)
Chilled Water Consumption
1
:
8 gpm (30 lpm)
Nitrogen Consumption
1
:
15 lpm (0.5 cfm)
Methane Consumption
1
:
40 lpm (1.4 cfm)
Process Exhaust - Static Pressure:
-5" to -2.5" w.c.
Electrical Consumption:
1900 watts
Notes:
1:
Process dependent
Facilities Specifications:
Process Connections:
1-4 inlets, KF40
Nitrogen Gas Source:
70-90 psi (482-620 KPa), 1/2" compression fitting
Clean Dry Air Source:
80-100 psi (552-690 KPa), 3/4" compression fitting
Methane Source:
0.2 - 5 psi (1.4-34.5 KPa), 1/2" Female NPT
Fresh Water Source:
40-60 psi (276-414 KPa), 1/2" Female NPT
Chilled Water Inlet:
55-75 psi (379-517 KPa), 50°F (10°C)
Chilled Water Inlet/Outlet:
1" Female NPT
Sump Pump Drain:
1/2" Female NPT
Process Exhaust:
6" (152 mm) SS or FRP
Electrical Supply:
208/230 VAC, 50/60 Hz, 20 A, 3 Wires
Overall Dimensions:
46" W x 28" D x 90" H (1168 mm x 711 mm x 2286 mm)
Clerance:
36" (914 mm) Front side only
Weight:
1532 lb (695 kg)
0.00 minimum for packaging, handling, and order processing. Shipping to be determined by destination.
Prior to shipment I will need to know the following information (filled out on a form that I will send you) for International Customers or Packages/Freight being Forwarded internationally. International customers may also be subject to a freight forwarder form if applicable.:
(1) Are you the end-user of this item?
(2) If you are not the ultimate end-user of the item, please state the ultimate end user's name.
(3) What is the ultimate country destination?
09/06/19