Maxtek MDC-360 Thin Film Deposition Controller 2-Channels, Made in USA - Tested

Description

Maxtek MDC-360 Thin Film Deposition Controller 2-Channels, Made in USA - Tested
Software Version 3.0
PURPOSE
The MDC-360 provides both automatic control of single or multi-layer film deposition in either a production or development environment and improved predictability and repeatability of deposited film characteristics through dependable digital control of the deposition process. It runs unattended in the fully automatic mode and provides such features as run completion in the event of crystal failure, and extensive internal checking. Performance limits and the abort feature can be set by the user.
The MDC-360 incorporates numerous features which are economically justifiable as a result of rapid advances in semiconductor technology and the advent of low cost microprocessors.
EXTENSIVE PROGRAM STORAGE
The MDC-360 is capable of storing up to 99 processes, 999 layer definitions and 32 complete material definitions. Once a program is entered it will be maintained in memory for a minimum of 5 years without external power.
DYNAMIC MEASUREMENT UPDATE RATE
Measurement is dynamically adjusted from 0.5 to 10 Hz for optimum resolution and control.
SUPERIOR GRAPHICS DISPLAY
The MDC-360 features a 256x64 pixel LCD graphics display allowing real time graphing of important process information such as rate, rate deviation, thickness and power.
PROGRAM SECURITY
To assure the integrity of stored programs, the MDC-360 incorporates edit passwords to guard against unauthorized program changes.
DESIGNED FOR UNATTENDED OPERATION
The MDC-360 has been designed for truly automatic operation and toward this end incorporates extensive internal monitoring and overriding abort circuitry to minimize the possibility of damage in the event of a failure or other problem in the total deposition system. In addition there are attention, alert and alarm signals with adjustable volume for trouble and routine operator call.
FAIL SAFE ABORTS
In the event of an MDC-360 failure, as evidenced by unsatisfactory internal checks, the MDC-360 will abort the process and shut off all outputs. In addition to the internal checks, the MDC-360 also provides user enabled aborts on excessive rate control error or crystal failure.
ABORT STATUS RETENTION
In the event that the MDC-360 does abort during the deposition process, pertinent information is stored at the time of abort. The process can be resumed after the problem is corrected.
RUN COMPLETION ON CRYSTAL FAILURE
The extensive monitoring and abort functions are designed to protect the system and/or process from serious and hopefully infrequent malfunctions of the deposition system. A condition which need not cause an abort is the condition of crystal failure. The MDC-360 can be set to abort upon crystal failure, or run to completion using a backup crystal or time/power method.
POWERFUL SYSTEM INTERFACE
Fully programmable discrete inputs and outputs permit the MDC-360 to be easily interfaced into deposition systems controlling the most complex processes. Also, source control outputs are fully isolated avoiding ground loop problems. The MDC-360 also supports input from an optical monitor for optical termination of film thickness.
POWER SUPPLY NOISE TOLERANCE
Integral RFI filter and large energy storage capacitors will tolerate high levels of power supply noise and power interruptions of 700 ms or less without effect.
INTERNATIONAL STANDARD POWER CONNECTOR
The power connector is internationally approved and meets IEC (International Electrotechnical Commission) standards. It allows selection of input power voltages ranging from 100 to 240 volts at a frequency of 50 or 60 Hz and includes an integral RFI filter.
FIELD UPGRADABLE
Plug-in interface boards and option boards allow the basic unit to be upgraded in the field to the maximum system level.
MEASUREMENT
Frequency Resolution 0.03 Hz @6.0 MHz
Mass Resolution 0.375 ng/cm2
Thickness Accuracy 0.5% + 1 count
Measurement Update Rate Dynamically adjusted, 0.5 to 10 Hz
Display Update Rate 10 Hz
Sensor Crystal Frequency 2.5, 3, 5, 6, 9, 10 MHz
DISPLAY
Thickness Display Autoranging: 0.000 to 999.9 KÅ
Rate Display Autoranging: 0.0 to 999 Å/sec
Power Display 0.0 to 99.9%
Time To Go 0 to 9:59:59 H:MM:SS
Crystal Health % 0 to 99%
Layer Number 1 to 999
Graphics Display 256X64 LCD with CCFL backlighting
COMMUNICATION
RS-232 serial port standard
RS-485 serial port optional
IEEE-488 bus interface optional
PROGRAM STORAGE CAPACITY
Process 99, user definable
Layer 999, user definable
Material 32, user definable
PROCESS PARAMETERS
Process Name 12 character string
Edit password 4 character string
Run/View password 4 character string
Layer# 1 to 999 Material name, Thickness
MATERIAL PARAMETERS
Material Name 10 character string
Sensor # 1 to 4
Crystal # 1 to 8
Source # 1 to 4
Pocket # 1 to 8
Material Density 0.80 to 99.9 gm/cm3
Acoustic Impedance 0.50 to 59.9 gm/cm2 sec
Tooling Factor 10.0 to 499.9%
Proportional gain 0.00 to 9999
Integral Time constant 0 to 99.9 sec
Derivative Time constant 0 to 99.9 sec
Rise to Soak Time 0 to 9:59:59 H:MM:SS
Soak Power 0 to 99%
Soak Time 0 to 9:59:59
Rise to Predeposit Time 0 to 9:59:59
Predeposit Power 0 to 99.9%
Predeposit Time 0 to 9:59:59
Rate Establish Time 0 to 60 sec
Rate Establish Error 0 to 99.9%
Deposition Rate (1 to 5) 00.0 to 999.9 Å/sec
Rate Ramp Start (1 to 4) 0.000 to 999.9 KÅ
Rate Ramp Stop (1 to 4) 0.000 to 999.9 KÅ
Time Setpoint 0 to 9:59:59
Ramp to Feed Time 0 to 9:59:59
Feed Power 0 to 99.9%
Feed Time 0 to 9:59:59
Ramp to Idle Time 0 to 9:59:59
Idle Power 0 to 99.9%
Maximum Power 0 to 99.9%
Power Alarm Delay 0 to 99 sec
Minimum Power 0 to 99.9%
Rate Deviation Attention 0 to 99.9%
Rate Deviation Alarm 0 to 99.9%
Rate Deviation Abort 0 to 99.9%
Sample Dwell % 0 to 100.0%
Sample Period 0 to 9:59:59
Crystal Fail Switch, Time Power, or Halt
Backup Sensor # 1 to 4
Backup Crystal # 1 to 8
Backup Tooling Factor 0 to 499.9%
Material Password 4 character string
INPUT/OUTPUT CAPABILITY
Sensor Inputs 2 Standard and 2 optional BNC inputs
Source Outputs 2 Standard and 2 optional fully isolated, 2.5, 5, 10 volts @ 20 ma. 0.002% resolution
Discrete Inputs 8 Standard and 8 optional fully programmable inputs.
The Passive I/O card (PN#179216) has TTL level inputs activated by a short across the input pins.
The Active I/O card (PN#179239) has
inputs activated by 12 to 120 volt
AC/DC across the input pins.
Discrete Outputs 8 standard and 8 optional fully programmable, SPST relay, 120VA, 2A max.
Abort Output 1 standard and 1 optional SPST
Relay, 120VA, 2A max.
Remote Power Handset Front panel, RJH jack
RS-232 Communication Rear panel, 9 pin, Full duplex, DTE Front panel, RJ11 jack, Full duplex
DAC Recorder Outputs Two 0 to 5 volts, 0.02% resolution
OTHER
Input Power Requirements 100, 120, 200, 240 VAC; 50/60 Hz; 25 watts
Operating Temperature Range 0 to 50°C
Physical Weight 10 LB
Physical Size 19” rackmount case 3 1/2” high x 9 3/8” deep
Condition:
Attentively used government surplus item.
Tested to power on, not available to test further.
Picked up from a discontinuing facility in working condition.
Photos represent the exact item that will be shipped. Please refer the photos.
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