EVG EV640R topside/backside mask aligner, rebuilt with installation and warranty

Description

This EVG EV640R aligner was completely rebuilt in 2021.
All major mechanical modules went through a tear-down, inspection, replacement, and rebuild process including the stage unit, cover plate, top and bottom microscope units, and lighthouse.
All pneumatics and cables were tested and replaced where necessary.
New labeling was installed throughout.
Currently setup for 4” wafers with 6” tooling available.
Manual wafer and mask loading.
Features: Topside alignment, backside camera-based alignment, software-based auto-alignment, wafer flat alignment, large gap alignment, 350W UV constant-energy or constant-power exposure.
Installation and training included.
Please don't hesitate to ask for additional information and/or pictures.