-40%
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2
Applied Material DPS G5 MESA T2

Applied Material DPS G5 MESA T2

$ 105600

Availability: 60 in stock
  • Condition: USED Tool from IDM
  • Brand: Applied Material
  • MPN: Does Not Apply
  • Custom Bundle: No
  • Technology: Etch
  • All returns accepted: ReturnsNotAccepted
  • Equipment Type: Wafer Processing Equipment
  • Inflection: Memory
  • Country/Region of Manufacture: United States

    Description

    AP Frame,
    EFEM : 3 Foup CYMEHCS Duraport-DE2, Kawasaki 3NT520B-A006, Piper VAC A100L,
    TM ROBOT : VHP
    Process Module : 3x MESA T2/RF (ETCH)
    (TMP: 3 x Edward STP-XA3203CV, 3 x IH1000C, RF GEN : AE APEX1513, AE APEX3103)
    Process GAS : SiCL4,HBR,C4F8,NF3,SF6,CL2,CF4,CHF3,O2,N2,AR,HE